Frictional Characteristics of a Small Aerostatic Linear Bearing

Frictional characteristics of a small aerostatic linear bearing are accurately evaluated by means of a method, in which the force acting on the moving part of the bearing is measured as the inertial force. An optical interferometer is newly developed to measure the Doppler shift frequency of the laser light reflected on the small moving part. From the measured time-varying Doppler shift frequency, the velocity, the position, the acceleration and the inertial force of the moving part are numerically calculated. It is confirmed that the dynamic frictional force acting inside the bearing is almost proportional to the velocity of the moving part and is similar to the theoretical value calculated under the assumption that the flow inside the bearing is the Couette flow