Add to ORKGThe paper reports results of the performed research work related to the deformations and stability of Al-Si parallel-plate electrostatic microactutors fabricated on silicon-on-insulator (SOI) wafer and subjected to uniform temperature changes. Presented research includes measurements of the deformation of Si beam with deposited Al thin-film microstructures as a function of temperature changes using Electronics Speckle Pattern Interferometry (ESPI) and a custom-built thermal module that is covered by optical beam splitter window to allow optical acces
The response of a polysilicon parallel-plate electrostatic actuator to AC signals at different bias ...
At the micro-scale, thermal actuation provides larger forces compared to the widely-used electrostat...
Recent techniques in radar and communication systems favor the development of phased arrays. The maj...
The paper reports results of the performed research work related to the deformations and stability o...
The in-plane motion of microelectrothermal actuator ("heatuator") has been analyzed for Si-based and...
This paper describes electrothermal microactuators that generate rectilinear displacements and force...
Abstract: This paper describes the fabrication and experimental characterization of bent-beam (...
ABSTRACT Microsystems using electrothermal bent-beam microactuators have been demonstrated for a var...
Microfabrication provides a powerful tool for batch processing and miniaturization of mechanical sys...
Bent and folded beam configurations have been popularly used in electrothermoelastic (E-T) actuation...
The recent developments of novel thin film materials and their associated processes have marked the ...
A thermal actuator (TA) is the thermal compliment of electrostatic actuators. A TA has several advan...
The in-plane motion of microelectrothermal actuator ("heatuator") has been analysed for Si-based and...
A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by sur...
This paper analyses the multiple coupling occurring in some metallic microstructures electrostatica...
The response of a polysilicon parallel-plate electrostatic actuator to AC signals at different bias ...
At the micro-scale, thermal actuation provides larger forces compared to the widely-used electrostat...
Recent techniques in radar and communication systems favor the development of phased arrays. The maj...
The paper reports results of the performed research work related to the deformations and stability o...
The in-plane motion of microelectrothermal actuator ("heatuator") has been analyzed for Si-based and...
This paper describes electrothermal microactuators that generate rectilinear displacements and force...
Abstract: This paper describes the fabrication and experimental characterization of bent-beam (...
ABSTRACT Microsystems using electrothermal bent-beam microactuators have been demonstrated for a var...
Microfabrication provides a powerful tool for batch processing and miniaturization of mechanical sys...
Bent and folded beam configurations have been popularly used in electrothermoelastic (E-T) actuation...
The recent developments of novel thin film materials and their associated processes have marked the ...
A thermal actuator (TA) is the thermal compliment of electrostatic actuators. A TA has several advan...
The in-plane motion of microelectrothermal actuator ("heatuator") has been analysed for Si-based and...
A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by sur...
This paper analyses the multiple coupling occurring in some metallic microstructures electrostatica...
The response of a polysilicon parallel-plate electrostatic actuator to AC signals at different bias ...
At the micro-scale, thermal actuation provides larger forces compared to the widely-used electrostat...
Recent techniques in radar and communication systems favor the development of phased arrays. The maj...