Thermo-mechanical analysis of microstructures for chemoresistive gas sensors

The thermo-mechanical behaviour of different bulk-micromachined microheater structures for chemoresistive gas sensors is investigated by means of 3D finite element simulation. Si3N4-SiO2-Si3N4 and SiO2-Si3N4-SiO2 stacked membranes are compared in terms of heat confinement and mechanical properties. The mechanical behaviour of the membrane and of two different suspended-bridge structures under applied external load is analysed. The present study served as a basis for the development of a microheater which hase shown excellent heating efficiency characteristics