On the ASTM electromigration test structure applied to Al-1%Si/TiN/Ti bamboo metal lines
- I. DE MUNARI
- M. VANZI
- A. SCORZONI
- FANTINI, Fausto
Publication date
January 1995
DOI Publisher
John Wiley & Sons Limited:1 Oldlands Way, Bognor Regis, P022 9SA United Kingdom:011 44 1243 779777, EMAIL: cs-journals@wiley.co.uk, INTERNET: http://www.wiley.co.uk, Fax: 011 44 1243 843232 ISSN
0748-8017 Citation count (estimate)
3Abstract
The applicability of NIST-ASTM electromigration test patterns when used to test "bamboo" metal lines is discussed
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