Mid-Infrared Supercontinuum Generation In High-Contrast, Fusion-Bonded Silicon Membrane Waveguides

Fusion-bonded suspended silicon waveguides with exemplary stability and geometrical design flexibility are fabricated at different sizes for nonlinear broadening in the mid-infrared. Pumping with a femtosecond laser source at ~4 μrn, broadband supercontinuum spectra are observedfrom X = 2-5and3-6μm