Support Loss Evasion In Breathing Mode High-Order Silicon Disc Resonators

Leakage of elastic waves through the anchors is commonly reported as the dominant Q-limiting mechanism in micro-resonators. Bulk mode silicon-based disk resonators are amongst the most attractive designs in literature as they could potentially offer high Q if supported from the center. However, such supporting scheme adds to the fabrication complexity and as such, side supported designs have been explored to achieve high Q for certain resonance modes