Small Oxide-Free Vertical-Cavity Surface-Emitting Lasers With High Efficiency And High Power

Data are presented showing high external differential quantum efficiency (DQE) and record-high output power in vertical-cavity surface-emitting lasers (VCSELs) with diameters below 3 μm. Good uniformity and reproducibility are achieved in devices with very small sizes. Over 75% DQEs are measured with maximum output powers of 5, 7.3, 8, 8.7 and 11.6 mW for 1, 1.5, 2, 2.5 and 3 μm diameter VCSELs, respectively