High-Temperature Characterization Of Sicn Ceramics For Wireless Passive Sensing Applications Up To 500°C

A novel technique is presented in this paper to precisely characterize silicon carbonitride (SiCN) ceramic materials at high temperatures for wireless passive sensing applications. This technique is based on a high quality (Q) factor resonator method, which allows accurate characterization of both dielectric constant and loss tangent. SiCN ceramic materials are measured from 50C up to 500C. It is observed that the dielectric constant of SiCN increases from 3.71 to 3.87, corresponding to a temperature range between 50 and 500°C. This temperature-dependent dielectric constant behavior provides the basis for the development of wireless passive temperature sensors in high-temperature applications. © 2011 IEEE