Silicon Carbide-Based Extreme Environment Hybrid Design Temperature Sensor Using Optical Pyrometry And Laser Interferometry

To the best of the authors\u27 knowledge, proposed and demonstrated is the first extreme environment temperature sensor using Blackbody (BB) radiation of a high-temperature material optical chip for coarse temperature measurement and classical Fabry-Perot (FP) laser interferometry via the same chip for fine temperature measurement. Such a hybrid design sensor can be used to accurately measure temperatures in excess of 750 °C such as needed for gas turbines in power plants and aircraft engines. The proposed sensor is designed and demonstrated using an all-Silicon Carbide (SiC) probe for temperatures from 795 °C to 1077 °C with an estimated average measurement resolution of 0.1 °C. © 2009 IEEE