Design And Fabrication Of An Extreme Temperature Sensing Optical Probe Using Silicon Carbide Technologies

For the first time, to the best of our knowledge, designed and fabricated is an extreme temperature optical sensor using a single crystal Silicon Carbide (SiC) optical chip packaged within a sintered SiC hollow tube. The fabricated assembly forms the critical frontend probe of the proposed hybrid wireless-wired optical sensor used for measuring \u3e1000 oC temperatures within hot gas chambers such as in coal-fired power generation systems. Initial probe test experiments show the required water-tight chip-end probe sealing and the desired retro-reflected optical interferograms required for temperature-based signal processing. © 2007 IEEE