In the present paper we consider two representative methods for residual stress evaluation at the micro-scale: a (semi-)destructive method involving material removal and the measurement of strain relief; and a non-destructive X-ray diffraction technique involving the use of micro-focused synchrotron X-ray beam. A recently developed strain relief approach is described using a Focused Ion Beam (FIB) to create a circular trench of progressively increasing depth around a circular "island". Residual stress is evaluated by the comparison of the strain relief (measured by digital correlation of displacements or strains) with Finite Element simulations. The technique is illustrated for a thin TiN coating layer. The second approach uses focused sync...
Residual stresses in semiconductor and MEMS devices superposing functional and environmental loading...
Residual stresses play a crucial role in determining material properties and behaviour, in terms of ...
Residual stresses play a crucial role in determining material properties and behaviour, in terms of ...
In the present paper we consider two representative methods for residual stress evaluation at the mi...
In the present paper we consider two representative methods for residual stress evaluation at the mi...
In this report, an optimised method for residual stress determination at the microscopic scale is pr...
"We present a new procedure for the determination of surface elastic residual stress by instrumented...
"Residual stress evaluation in thin films at the sub-micron scale was achieved in the present study ...
In this paper, a new approach is presented for local residual stress measurement in MEMS structures....
Quantification of residual stress gradients can provide great improvements in understanding the comp...
Residual stress has a significant effect on the performance of thin films, in terms of adhesion, har...
In the present study, residual stress evaluation in thin films was achieved using a semi-destructive...
Residual stress has a significant effect on the performance of thin films, in terms of adhesion, har...
Due to the individual steps of manufacturing various kinds of residual stresses and strains are indu...
The use of a focused ion beam equipment is reported to find out the in-plane residual stress value o...
Residual stresses in semiconductor and MEMS devices superposing functional and environmental loading...
Residual stresses play a crucial role in determining material properties and behaviour, in terms of ...
Residual stresses play a crucial role in determining material properties and behaviour, in terms of ...
In the present paper we consider two representative methods for residual stress evaluation at the mi...
In the present paper we consider two representative methods for residual stress evaluation at the mi...
In this report, an optimised method for residual stress determination at the microscopic scale is pr...
"We present a new procedure for the determination of surface elastic residual stress by instrumented...
"Residual stress evaluation in thin films at the sub-micron scale was achieved in the present study ...
In this paper, a new approach is presented for local residual stress measurement in MEMS structures....
Quantification of residual stress gradients can provide great improvements in understanding the comp...
Residual stress has a significant effect on the performance of thin films, in terms of adhesion, har...
In the present study, residual stress evaluation in thin films was achieved using a semi-destructive...
Residual stress has a significant effect on the performance of thin films, in terms of adhesion, har...
Due to the individual steps of manufacturing various kinds of residual stresses and strains are indu...
The use of a focused ion beam equipment is reported to find out the in-plane residual stress value o...
Residual stresses in semiconductor and MEMS devices superposing functional and environmental loading...
Residual stresses play a crucial role in determining material properties and behaviour, in terms of ...
Residual stresses play a crucial role in determining material properties and behaviour, in terms of ...