Laser-induced crystallization of amorphous silicon-carbon alloys studied by Raman microspectroscopy

CW-laser crystallization of amorphous silicon carbon alloys has been investigated as a function of both laser power density and alloy composition. Irradiation of such alloys generally yields phase segregation into crystalline silicon and crystalline graphite, depending on the laser power density, while crystalline SiC phase can be obtained only when nearly stoichiometric amorphous silicon-carbon alloy are irradiated. (C) 1999 Published by Elsevier Science B.V. All rights reserved