Guided-wave photodetectors in germanium on SOI optical chips
- Sorianello V
- Balbi M
- Colace L
- Socci L
- Bolla L
- Mutinati G
- Romagnoli M.
- ASSANTO, GAETANO
Publication date
January 2009
DOI Publisher
Elsevier BV ISSN
1386-9477 Citation count (estimate)
6Abstract
We report on near-infrared waveguide photodetectors realized in germanium evaporated at low temperature on silicon-on-insulator optical chips. We discuss the fabrication and integration and show experimental results in terms of dark current, responsivity and signal to noise ratio. (C) 2008 Elsevier B.V. All rights reserved
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