Fe2O3-TiO2 systems grown by MOCVD: an XPS study

The present work was devoted to the X-ray photoelectron spectroscopy (XPS) investigation of the principal core levels of a Fe2O3-TiO2 system. The sample was synthesized on a glass substrate at 430°C in N2/O2 atmospheres by low-pressure metal organic chemical vapor deposition (MOCVD) co-evaporating the precursors titanium(IV)isopropoxide [Ti(OiPr)4] and bis-(methylcyclopentadienyl)Fe(II) [Fe(MeCp)2] through independent sources. Beside the wide scan spectrum, detailed spectra for O 1s, Fe 2p and Ti 2p regions and related data are presented and discussed. XPS analysis revealed the presence of iron(III) and titanium(IV) oxides as the main phases, with a possible Fe2O3 segregation on the specimen surface