RBS-channeling analysis of virgin 6H-SiC: Experiments and Monte Carlo simulations

The aim of this work is to define both the experimental procedures (random geometry and maximum beam fluence) and a set of reference parameters (minimum yield and amplitude of angular dips) to be used for the Rutherford Backscattering Spectrometry channeling (RBS-channeling) analysis of (0001) 6H-SiC crystals. The [0001], (10 (1) over bar 0) and (11 (2) over bar 0) spectra and angular dips were simulated by a Monte Carlo (MC) computer code. The results were compared with the measurements performed on good quality crystals grown by the Lely technique. (C) 1998 Elsevier Science B.V