Nano-mechanical testing in situ in the transmission electron microscope TEM

In recent years, mechanical properties of thin films and nanostructures have attracted a significant amount of attention. Although it is now well established that the mechanical characteristics of tiny things differ fundamentally from those of their bulk counterparts, understanding how these thins film react under stress is crucial for development of Microelectromechanical system and microelectronic. The nanomechanical measurement performed by combining high resolution capability of TEM and straightforward device (PtP), this in situ observation in TEM allow to study the mechanical behaviour in real time and to extract much more accurate data from the sample. In this work, an aluminium transfer frame is fabricated to ensure the manipulation of amorphous alumina Al2O3 ultrathin film tensile structure (25nm) onto a "Push-to-Pull" devices used for nanoscale tensile testing