The use of masked UV (i-line) lithography in a MEMS foundry for CMOS-compatible fabrication of large-area metasurface-based absorbers for the mid-infrared is demonstrated. The challenges are in: (a) the limited number of acceptable metals, (b) the thickness tolerance of the layers used in the CMOS process, and (c) the imaging capabilities of i-line lithography as compared to e-beam. The claimed throughput advantage with manageable distortion of masked lithography and the suitability of the layers used in a CMOS-compatible process in the fabrication of mid-IR absorbers was tested. Issues investigated are: (a) the impact of aluminium as the preferred metal in the MIM patch on the plasmonic response, (b) the influence of SiO2 as preferred diel...
A metasurface is a layer of subwavelength-scale nanostructures that can be used to design functional...
Infrared absorbers are essential structures in the design of thermal emitters and thermal infrared i...
Metasurfaces with sub-wavelength nanoscale features have emerged as a platform to achieve desirable ...
The use of masked UV (i-line) lithography in a MEMS foundry for CMOS-compatible fabrication of large...
<p>The design and fabrication of wideband mid-infrared metamaterial absorbers are presented. The emp...
The design and fabrication of wideband mid-infrared metamaterial absorbers are presented. The emphas...
Metasurface coatings on a free-standing SiN thin film membrane are fabricated on a Si substrate usin...
The design of a mid-infrared micro-spectrometer based on an array of differently tuned narrow-band m...
Metamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patte...
Metamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patte...
Metamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patte...
A CMOS-compatible approach is presented for the fabrication of a wideband mid-IR metamaterial-based ...
A CMOS-compatible approach is presented for the fabrication of a wideband mid-IR metamaterial-based ...
International audienceMetasurfaces with sub-wavelength nanoscale features have emerged as a platform...
International audienceMetasurfaces with sub-wavelength nanoscale features have emerged as a platform...
A metasurface is a layer of subwavelength-scale nanostructures that can be used to design functional...
Infrared absorbers are essential structures in the design of thermal emitters and thermal infrared i...
Metasurfaces with sub-wavelength nanoscale features have emerged as a platform to achieve desirable ...
The use of masked UV (i-line) lithography in a MEMS foundry for CMOS-compatible fabrication of large...
<p>The design and fabrication of wideband mid-infrared metamaterial absorbers are presented. The emp...
The design and fabrication of wideband mid-infrared metamaterial absorbers are presented. The emphas...
Metasurface coatings on a free-standing SiN thin film membrane are fabricated on a Si substrate usin...
The design of a mid-infrared micro-spectrometer based on an array of differently tuned narrow-band m...
Metamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patte...
Metamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patte...
Metamaterial absorbers are photonic structures composed of an array of sub-wavelength metallic patte...
A CMOS-compatible approach is presented for the fabrication of a wideband mid-IR metamaterial-based ...
A CMOS-compatible approach is presented for the fabrication of a wideband mid-IR metamaterial-based ...
International audienceMetasurfaces with sub-wavelength nanoscale features have emerged as a platform...
International audienceMetasurfaces with sub-wavelength nanoscale features have emerged as a platform...
A metasurface is a layer of subwavelength-scale nanostructures that can be used to design functional...
Infrared absorbers are essential structures in the design of thermal emitters and thermal infrared i...
Metasurfaces with sub-wavelength nanoscale features have emerged as a platform to achieve desirable ...