International audienceThis paper reports a novel axisymmetric quartz MEMS gyroscope, named GYTRIX, able to work-for the first time to our knowledge-as a whole angle gyro. The proposed GYTRIX cell differs from the state of the art by the use of balanced vibration modes, naturally decoupled from the support, and a very simple and pure axisymmetric design, implementing an original principle of decoupling of the useful modes, which gives the resonators very high quality factors. As a proof of concept, the gyroscope presented is designed to operate in open-loop mode in order to facilitate the first characterizations of the cell. Thanks to its symmetry, isotropy and high quality factor, the gyroscope characteristics give up towards a theoretical ...
MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and m...
In recent years, MEMS gyroscopes have become nearly omnipresent. From their origins in automotive s...
This paper presents a single-crystal silicon symmetrical and decoupled (SYMDEC) gyroscope implemente...
International audienceThis paper reports a novel axisymmetric quartz MEMS gyroscope, named GYTRIX, a...
We report on a new design approach for X-Y symmetric resonator, emphasizing the increase in symmetry...
Since their conception in the 1990s, MEMS gyroscopes have gained increasing popularity over traditio...
We report detailed characterization of a vacuum sealed angle measuring silicon MEMS gyroscope. The n...
This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mas...
We report detailed characterization of a vacuum sealed angle measuring silicon MEMS gyroscope. The n...
MasterGyroscopes (gyro) are devices that measure angle or angular rate, based on the principle of co...
The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent ye...
Abstract—We report a new family of ultra-high Q silicon MEMS tuning fork gyroscopes demonstrating an...
A linear vibratory MEMS gyroscope is an angular rate sensor. The operation principle is based on two...
This paper reports a new symmetric gyroscope structure that allows not only matched resonant frequen...
This paper presents a high performance, automatic mode-matched, single-mass, and fully-decoupled MEM...
MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and m...
In recent years, MEMS gyroscopes have become nearly omnipresent. From their origins in automotive s...
This paper presents a single-crystal silicon symmetrical and decoupled (SYMDEC) gyroscope implemente...
International audienceThis paper reports a novel axisymmetric quartz MEMS gyroscope, named GYTRIX, a...
We report on a new design approach for X-Y symmetric resonator, emphasizing the increase in symmetry...
Since their conception in the 1990s, MEMS gyroscopes have gained increasing popularity over traditio...
We report detailed characterization of a vacuum sealed angle measuring silicon MEMS gyroscope. The n...
This thesis presents a z-axis MEMS gyroscope with a symmetric mechanical structure. The multiple-mas...
We report detailed characterization of a vacuum sealed angle measuring silicon MEMS gyroscope. The n...
MasterGyroscopes (gyro) are devices that measure angle or angular rate, based on the principle of co...
The symmetric MEMS gyroscope is a typical representative of inertial navigation sensors in recent ye...
Abstract—We report a new family of ultra-high Q silicon MEMS tuning fork gyroscopes demonstrating an...
A linear vibratory MEMS gyroscope is an angular rate sensor. The operation principle is based on two...
This paper reports a new symmetric gyroscope structure that allows not only matched resonant frequen...
This paper presents a high performance, automatic mode-matched, single-mass, and fully-decoupled MEM...
MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and m...
In recent years, MEMS gyroscopes have become nearly omnipresent. From their origins in automotive s...
This paper presents a single-crystal silicon symmetrical and decoupled (SYMDEC) gyroscope implemente...