Heteroepitaxial Growth of Lithium Niobate Thin Films on Sapphire Substrates with Different Orientations by Pulsed-Laser Deposition
- Pershukov, Ihor
- Richy, Jérôme
- Borel, Emma
- Soulat, Elisa
- Bousquet, Marie
- Dupont, Florian
- Vilquin, Bertrand
Publication date
June 2022
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
International audienceIn this study, epitaxial LiNbO3 thin films were successfully grown on a- and c-Al2O3 substrates by Pulsed Laser Deposition (PLD). In order to control the film crystallinity and chemical composition, the influence of different growth parameters, such as substrate temperature, oxygen pressure, and target composition, were studied. The physical and chemical properties of the as-deposited LiNbO3 layers were characterized
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