We present here the design, implementation and characterization of a heterodyne laser interferometer for sub-nanometer displacement metrology. The analyses and experimental activity reported in this thesis are part of a wider study, aimed to the realization of an external metrology truss for the stabilization of large opto-mechanical structures. The purpose is to monitor the three-dimensional shape of an array of large ring-lasers, planned for future General Relativity experiments. Reaching the required 10^-11m displacement uncertainty over 7m distances and several days integration periods is an challenging task. The proposed solution consists of a non-polarizing Mach-Zehnder configuration, featuring an optical cancelable circuit and a hole...
Femto-Second based Laser (FSL) systems enable a large range of concepts for distance measurement tha...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
An accurate metrology system is required to stabilize the differential path lengths in the Nulling I...
We present here the design, implementation and characterization of a heterodyne laser interferometer...
We present the design, implementation, and characterization of a heterodyne laser interferometer fo...
Active control of the geometrical parameters of large ring-lasers arrays is a challenging task, requ...
Active control of the geometrical parameters of large ring-lasers arrays is a challenging task, requ...
The sensitivity achieved by large ring-laser gyroscopes will make it possible to detect faint relati...
Development in industry is asking for improved resolution and higher accuracy in mechanical measurem...
Large-frame ring laser gyroscopes are extremely sensitive inertial detectors of rotational motion. W...
The sensitivity achieved by large ring-laser gyroscopes will make it possible to detect faint relati...
Laser interferometer systems are known for their high resolution, and especially for their high rang...
This paper presents a novel laser encoder for sub-nanometer displacement measurement. It is based on...
This thesis describes a laser heterodyne interferometer for measuring the displacement of a high per...
In order to achieve nanometer accuracy, metrologists need to identify the sources of error...
Femto-Second based Laser (FSL) systems enable a large range of concepts for distance measurement tha...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
An accurate metrology system is required to stabilize the differential path lengths in the Nulling I...
We present here the design, implementation and characterization of a heterodyne laser interferometer...
We present the design, implementation, and characterization of a heterodyne laser interferometer fo...
Active control of the geometrical parameters of large ring-lasers arrays is a challenging task, requ...
Active control of the geometrical parameters of large ring-lasers arrays is a challenging task, requ...
The sensitivity achieved by large ring-laser gyroscopes will make it possible to detect faint relati...
Development in industry is asking for improved resolution and higher accuracy in mechanical measurem...
Large-frame ring laser gyroscopes are extremely sensitive inertial detectors of rotational motion. W...
The sensitivity achieved by large ring-laser gyroscopes will make it possible to detect faint relati...
Laser interferometer systems are known for their high resolution, and especially for their high rang...
This paper presents a novel laser encoder for sub-nanometer displacement measurement. It is based on...
This thesis describes a laser heterodyne interferometer for measuring the displacement of a high per...
In order to achieve nanometer accuracy, metrologists need to identify the sources of error...
Femto-Second based Laser (FSL) systems enable a large range of concepts for distance measurement tha...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
An accurate metrology system is required to stabilize the differential path lengths in the Nulling I...