Study and design of a bulk MEMS gyroscope

In this thesis, carried out in collaboration with Hanking Electronics, the design of an innovative bulk MEMS gyroscope is presented. To begin with, the state of the art is discussed, with focus on MEMS manufacturing technology and bulk gyroscopes’ working principle. Then, a theoretical model, that allows to fully describe the behavior of a bulk MEMS gyroscope from both the mechanical and the electrical point of view, is developed. Based on this model, the design parameters that mostly affect the gyroscope’s performances are identified and an innovative geometry for a bulk gyroscope is developed. In conclusion, the process that leads to the complete definition of the new device is explained in detail and its performances are compared with those of a traditional lumped gyroscope designed at Hanking Electronics