International audiencePolycrystalline silicon nanowires are synthesized using a classical fabrication method commonly used in microelectronic industry: the sidewall spacer formation technique. Assets of this technological process rest on low cost lithographic tools use, classical silicon planar technology compatibility and the possibility to get by direct patterning numerous parallel nanowires with precise location on the substrate. Grounded and suspended polycrystalline silicon nanowires with a curvature radius as low as 150nm are integrated into resistors and used as gas (ammonia) sensors. Results show potential use of these nanowires for charged chemical species detection with an increase of the sensitivity with the increase of SiNWs exc...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceResistors based on parallel suspended polycrystalline silicon nanowires are fa...
International audiencePolycrystalline silicon nanowires are synthesized using a classical fabricatio...
International audiencePolycrystalline silicon nanowires are synthesized using a classical fabricatio...
International audiencePolycrystalline silicon nanowires are synthesized using a classical fabricatio...
WOSInternational audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS...
WOSInternational audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS...
WOSInternational audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS...
International audiencePolysilicon nanowires are synthesized following a classical top-down approach ...
International audiencePolysilicon nanowires are synthesized following a classical top-down approach ...
International audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS (V...
International audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS (V...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceResistors based on parallel suspended polycrystalline silicon nanowires are fa...
International audiencePolycrystalline silicon nanowires are synthesized using a classical fabricatio...
International audiencePolycrystalline silicon nanowires are synthesized using a classical fabricatio...
International audiencePolycrystalline silicon nanowires are synthesized using a classical fabricatio...
WOSInternational audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS...
WOSInternational audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS...
WOSInternational audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS...
International audiencePolysilicon nanowires are synthesized following a classical top-down approach ...
International audiencePolysilicon nanowires are synthesized following a classical top-down approach ...
International audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS (V...
International audienceSilicon nanowires (SiNWs) are synthesized following two methods: i) the VLS (V...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceThanks to their high surface to volume ratio, silicon nanowires (SiNWs) are go...
International audienceResistors based on parallel suspended polycrystalline silicon nanowires are fa...