Introducing The Small World: Developing The Mems/Nanotechnology Curriculum

© ASEE 2009MEMS (Microelectromechanical Systems) and nanotechnology are believed to be the exciting drive to trigger the next wave of technology revolution. MEMS refer to systems in micro scale (1 micron to 1 millimeter) that integrates mechanical components, sensors, actuators, and electronics on a common silicon substrate through micromachining technology. Due to its low cost, small size, light weight and high resolution, MEMS has been widely used in automobiles, medical health care, aerospace, consumer products and RF communications. Nanotechnology refers to a field of applied science and technology about materials and devices in the atomic and molecular scale, normally 1 to 100 nanometers. It can offer better built, longer lasting, cleanser, safer and smarter products for home, communications, medicine, transportation, agriculture and many other fields. MEMS and nanotechnology can be combined to create a new exciting field of NEMS (Nanoelectromechanical system). In order to introduce engineering students into this amazing micro and nanotechnology field, we developed three corresponding graduate-level courses: Introduction to MEMS (EE446) and Introduction to Nanotechnology (EE451), and Microelectronic Fabrication (EE448). In addition, we have other related courses to support this program, such as EE 447: Semiconductor, EE 404: CMOS VLSI, EE 410: Bio-sensors, etc. This paper will discuss the course structure, syllabuses, course modules, student feedbacks, as well as future plans for this program. This curriculum offer students comprehensive knowledge and experience in MEMS and nanotechnology. Students use various CAD tools such as ANSYS FEM to design and simulate various MEMS/NEMS devices in the course projects. Multimedia technology is also used during the classroom teaching. We played vivid photos/videos to show the operation of MEMS/NEMS devices and state-of-the-art micro/nano fabrication processes in industry. Students demonstrated tremendous interest in this micro/nanotechnology program. The enrollment to these courses has been overwhelming and we have to create extra sessions to accommodate students with strong interest in this program. Our graduated students are well prepared for the industry in micro/nanotechnology fields. This program can also be helpful for the effort of the Connecticut Nanotechnology Curriculum Committee