We present a thin film circular diaphragm for the implementation of micro electro-mechanical systems (MEMS) resonant mass sensors for detecting particles (e.g., PM10) in air. A piezoelectric resonating membrane with frequency of about 100kHz is used as high precision microbalance operated in flexural mode. The natural frequency shift is proportional to the extra mass added on its surface and can be related to the particle concentration in the sampled air-volume. The vibrational spectrum is recorded by means of a vibrometer and the mass sensitivity is then evaluated by measuring the frequency shift adding extra mass of calibrated PM5 particles (Silica beads) on the membrane surface. The feasibility study has experimentally showed real-time d...
This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS res...
This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS res...
This paper reports the achievement of a mass balanced condition in a low-Q weakly coupled MEMS reson...
We present a thin film circular diaphragm for the implementation of micro electro-mechanical systems...
Resonating MEMS mass sensors are microdevices with broad applications in fields such as bioscience a...
The evaluation of a sensitive MEMS particulate matter monitoring (PM) system is presented. The senso...
Abstract — This work presents thermally actuated Micro-electromechanical resonant sensors capable of...
This work presents the technological basis for implementation of MEMS-based air-borne particulate co...
In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost se...
This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Elect...
A silicon cantilever with slender geometry based Micro Electro Mechanical System (MEMS) for nanopart...
To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (...
This work presents thermally actuated MEMS resonators specifically designed for mass measurement of ...
Respirable particulate matter (e.g, PM2.5 and PM10) is one of the most critical global pollutants, c...
Fine particulate matters (PM) have a real impact on the quality of life and health of millions of pe...
This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS res...
This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS res...
This paper reports the achievement of a mass balanced condition in a low-Q weakly coupled MEMS reson...
We present a thin film circular diaphragm for the implementation of micro electro-mechanical systems...
Resonating MEMS mass sensors are microdevices with broad applications in fields such as bioscience a...
The evaluation of a sensitive MEMS particulate matter monitoring (PM) system is presented. The senso...
Abstract — This work presents thermally actuated Micro-electromechanical resonant sensors capable of...
This work presents the technological basis for implementation of MEMS-based air-borne particulate co...
In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost se...
This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Elect...
A silicon cantilever with slender geometry based Micro Electro Mechanical System (MEMS) for nanopart...
To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (...
This work presents thermally actuated MEMS resonators specifically designed for mass measurement of ...
Respirable particulate matter (e.g, PM2.5 and PM10) is one of the most critical global pollutants, c...
Fine particulate matters (PM) have a real impact on the quality of life and health of millions of pe...
This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS res...
This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS res...
This paper reports the achievement of a mass balanced condition in a low-Q weakly coupled MEMS reson...