MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets
- Maspero F.
- Gatani G.
- Cuccurullo S.
- Bertacco R.
Publication date
January 2021
DOI Publisher
Institute of Electrical and Electronics Engineers Inc.Abstract
A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented
Add to ORKG