Gentle Patterning Approaches toward Compatibility with Bio-Organic Materials and Their Environmental Aspects

Funding Information: A.K.G. and K.A.M. acknowledge funding from Russian Science Foundation under Grant No. 19‐73‐10154. A.G.N. acknowledges Russian Foundation of Basic Research project no. 20‐03‐00804. The authors acknowledge the Ministry of Science and Higher Education of the Russian Federation (Project No. FZSR‐2020‐0007 in the framework of the State Assignment No. 075‐03‐2020‐097/1). This work is supported by the Council on grants of the President of the Russian Federation grant number НШ‐1330.2022.1.3. MIPT Center for Photonics and 2D Materials is supported by the Ministry of Science and Higher Education of the Russian Federation (No. FSMG‐2021‐0005). Publisher Copyright: © 2022 The Authors. Small published by Wiley-VCH GmbH.Advances in material science, bioelectronic, and implantable medicine combined with recent requests for eco-friendly materials and technologies inevitably formulate new challenges for nano- and micropatterning techniques. Overall, the importance of creating micro- and nanostructures is motivated by a large manifold of fundamental and applied properties accessible only at the nanoscale. Lithography is a crucial family of fabrication methods to create prototypes and produce devices on an industrial scale. The pure trend in the miniaturization of critical electronic semiconducting components has been recently enhanced by implementing bio-organic systems in electronics. So far, significant efforts have been made to find novel lithographic approaches and develop old ones to reach compatibility with delicate bio-organic systems and minimize the impact on the environment. Herein, such delicate materials and sophisticated patterning techniques are briefly reviewed.Peer reviewe