Harmonic cantilevers for nanomechanical sensing of elastic properties

We present a micromachined scanning probe cantilever, in which a specific higher order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have demonstrated that such cantilevers enable sensing of nonlinear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy. © 2003 IEEE