Stoichiometry and infrared absorption of amorphous a-C1-xNx : H carbon nitride films

  • Bouchet-Fabre, B.
  • Godet, C.
  • Lacerda, M.
  • Charvet, S.
  • Zellama, K.
  • Ballutaud, D.
Publication date
January 2004
Publisher
AIP Publishing

Abstract

Stoichiometry, bonding configurations and structural properties of plasma-deposited hydrogen-rich amorphous carbon nitride a C12xNx :H (0,x,0.20) films have been investigated using infrared and Raman vibrational spectroscopies, along with x-ray photoemission spectroscopy at the C and N K-edges. With increasing N incorporation in a-C12xNx :H, the total H content decreases slightly and CH vibrations are progressively replaced by NH vibrations. The dominant bonding configuration is CvN throughout the composition range, although CvN and CN saturate above 10 N at. %, and CwN configurations steadily increase throughout the stoichiometry range. A strong conjugation of imine (CvN) and nitrile (CwN) groups with aromatic rings is evidenced while the ...

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