High power applications of RF-MEMS
- Blondy, Pierre
- Palego, Cristiano
- Pothier, Arnaud
- Crunteanu, Aurelian
- Gasseling, A.
- Champeaux, Corinne
- Catherinot, Alain
- Tristant, Pascal
DOIAbstract
International audienceThis paper presents recent results on the development of high power MEMS switched varactors. Design methodology as well as fabrication and measurement results are presented. The MEMS varactors are made of a thick metal gold cantilever, with a reduced contact area, that allows to control high power microwave signals. Operation up to 5 watts CW is demonstrated, with good reliability. First results on applications to phase shifters is presente
Add to ORKG