Fabrication of 1D and 2D structures at submicrometer scale on lithium niobate by electron beam bombardment

International audienceOne and two dimensional structures at the submicrometer scale have been realized on lithium niobate using an innovative technique: the electron beam bombardment associated to chemical etching. The engraved patterns should allow one to get photonic crystal, and particularly photonic bandgap structures at optical wavelength. The method is presented in a first step and then, the influence of the experimental parameters is studied to understand their effects on the process. After optimization, structures of few hundreds nanometers in diameter have been obtained