Athermal waveguides for optical communication wavelengths.

We report on the design, fabrication, and characterization of temperature insensitive strip silicon-on-insulator racetrack resonators. The influence of various parameters, such as waveguide width, waveguide height, ring radius, coupling length, ring gap, and operating wavelength, on temperature-dependent wavelength shift is examined. A resonant wavelength shift of 0.2 pm/K at a 1550 nm wavelength is measured for 335 nm×220 nm waveguides. A significant reduction of waveguide propagation losses, improved ring Q value, and higher extinction ratio are obtained after overlaying the silicon waveguides with a polymer cladding