Raman-in-SEM studies of inorganic materials

SEM-EDS and micro-Raman spectroscopy have been combined for material characterization in several recent studies. Switching from one to the other is frequently considered as a problem that cannot be solved using specific solutions. Although both techniques have followed a parallel but very different evolution since their introduction in the early 1930s, the concept of Raman-in-SEM first began in the 1980s and the first commercial systems were marketed in the early 2000s. The two main systems and techniques that have been developed and marketed by three manufacturers are presented and described in this chapter. An evaluation of their advantages and limitations is proposed. A metrological study is then proposed for one of these systems, based on the 'on-axis' technique using a curved mirror placed under the SEM pole piece. This study allows a discussion of the performance and limitations of Raman spectroscopy when performed in a SE