Add to ORKGInternational audienceIn this article, a new concept of microswitch is investigated with the objective to decrease the actuation voltage. It consists in a component with two kinds of actuation mechanisms: piezoelectric actuation and electrostatic actuation. The structures were realized with a technology compatible with CMOs technology. Aluminium nitride (AIN) was selected as piezoelectric material for its maturity and integration capabilities
One of the most common applications of MEMS is by utilizing them as microsensors and microactuators....
This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have...
This paper reports on the first implementation of low voltage complementary logic (< 1.5 V) by us...
International audienceIn this article, a new concept of microswitch is investigated with the objecti...
International audienceThis article presents a study of microswitches with piezoelectric actuation. W...
The research in the field of microrelay is now oriented to MEMS devices. They offer the possibility ...
RF MEMS components, such as switches and variable capacitors, offer advantages over RF semi-conducti...
ABSTRACT: This paper considers MEMS microswitches with piezoelectric-film actuation. A mathematical ...
In this research, a functionally graded microbeam bonded with piezoelectric layers is analyzed under...
RF MEMS components, such as switches and variable capacitors, offer advantages over RF semi-conducti...
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding ...
The continuous scaling of the metal-oxide-semiconductor-field-effect-transistor (MOSFET) has led to ...
This paper proposes the design and analysis of RF MEMS switches using two different PZT materials. T...
Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N)...
Radio frequency micro electro mechanical systems (RF MEMS) have enabled a new generation of devices ...
One of the most common applications of MEMS is by utilizing them as microsensors and microactuators....
This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have...
This paper reports on the first implementation of low voltage complementary logic (< 1.5 V) by us...
International audienceIn this article, a new concept of microswitch is investigated with the objecti...
International audienceThis article presents a study of microswitches with piezoelectric actuation. W...
The research in the field of microrelay is now oriented to MEMS devices. They offer the possibility ...
RF MEMS components, such as switches and variable capacitors, offer advantages over RF semi-conducti...
ABSTRACT: This paper considers MEMS microswitches with piezoelectric-film actuation. A mathematical ...
In this research, a functionally graded microbeam bonded with piezoelectric layers is analyzed under...
RF MEMS components, such as switches and variable capacitors, offer advantages over RF semi-conducti...
Electromechanical transducers based on piezoelectric layers and thin films are continuously finding ...
The continuous scaling of the metal-oxide-semiconductor-field-effect-transistor (MOSFET) has led to ...
This paper proposes the design and analysis of RF MEMS switches using two different PZT materials. T...
Piezoelectric micromirrors with aluminum nitride (AlN) and aluminum scandium nitride (Al0.68Sc0.32N)...
Radio frequency micro electro mechanical systems (RF MEMS) have enabled a new generation of devices ...
One of the most common applications of MEMS is by utilizing them as microsensors and microactuators....
This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have...
This paper reports on the first implementation of low voltage complementary logic (< 1.5 V) by us...