International audienceMEMS resonators can bring an important added value in many fields of application. For example, MEMS resonators are good candidates to replace quartz oscillators. In this paper, we present MEMS resonator designs and measurements at various frequencies while they were built using the same process. We put in exergue the frequency shift induced by resonator sizes variation such as process inaccuracy. This measured frequency shift proves the need for a frequency shift compensation method for industrial perspectives
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanism...
A l’heure actuelle, les Micro-Electro-Mechanical-Systems (MEMS) sont devenusincontournables dans les...
Micro-mechanical sensors are typically fabricated both in large numbers and economically using the p...
International audienceMEMS resonators can bring an important added value in many fields of applicati...
International audienceMEMS resonators can bring an important added value in many fields of applicati...
International audienceIn this paper, compensation of frequency shifting of MEMS resonators using an ...
International audienceIn this paper, compensation of frequency shifting of MEMS resonators using an ...
International audienceIn this paper, compensation of frequency shifting of MEMS resonators using an ...
Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing ...
Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing ...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
A Microelectromechanical System (MEMS) is based on Microelectronic Technique and Micromachining tech...
AbstractAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Silicon oscillator...
MEMS surface-micromachining fabrication requires the use of many different tools to deposit thin-fil...
Resonant MEMS accelerometers offer the potential for very high resolution and wide bandwidth measure...
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanism...
A l’heure actuelle, les Micro-Electro-Mechanical-Systems (MEMS) sont devenusincontournables dans les...
Micro-mechanical sensors are typically fabricated both in large numbers and economically using the p...
International audienceMEMS resonators can bring an important added value in many fields of applicati...
International audienceMEMS resonators can bring an important added value in many fields of applicati...
International audienceIn this paper, compensation of frequency shifting of MEMS resonators using an ...
International audienceIn this paper, compensation of frequency shifting of MEMS resonators using an ...
International audienceIn this paper, compensation of frequency shifting of MEMS resonators using an ...
Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing ...
Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing ...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
A Microelectromechanical System (MEMS) is based on Microelectronic Technique and Micromachining tech...
AbstractAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Silicon oscillator...
MEMS surface-micromachining fabrication requires the use of many different tools to deposit thin-fil...
Resonant MEMS accelerometers offer the potential for very high resolution and wide bandwidth measure...
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanism...
A l’heure actuelle, les Micro-Electro-Mechanical-Systems (MEMS) sont devenusincontournables dans les...
Micro-mechanical sensors are typically fabricated both in large numbers and economically using the p...
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