Scheduling job families on non identical parallel machines under Run-To-Run control constraints

International audienceNew challenges are arising when solving scheduling problems in semiconductor manufacturing plants (fabs) with Advanced Process Control (APC) constraints. In particular, a Run-To-Run (R2R) control loop for a given product on a machine requires to regularly collect data for the product on the machine. This paper aims at introducing and modeling a new scheduling problem in which there is a time constraint on jobs of the same product, i.e. the time interval between two consecutive jobs of the same product should be smaller than a given threshold. Two Mixed Integer Linear Programming models are presented for scheduling jobs on non-identical parallel machines with setup times