Building the electricalmodel of the PhotoelectricLaserStimulation of a PMOS transistor in 90 nm technology

ESREF 2012 - 23rd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis Cagliari, Italy 2012International audienceThis paper presents the electricalmodel of aPMOStransistor in 90 nm technology under 1064 nm PhotoelectricLaserStimulation. The model was built and tuned from measurements made on test structures. It permits to simulate the effect of a continuous wave laser on aPMOStransistor by taking into account the laser's parameters (i.e. spot size and location, or power) and the PMOS' geometry and bias. It offers a significant gain of time by comparison with experiments and makes possible to build 3D photocurrent cartographies generated by the laser on the PMOS