Vacuum chamber design for calibration of pressure sensors

U uvodnom dijelu ovog rada dana je kratka povijest, fizikalne osnove te podjela vakuuma. Zatim je dan pregled procesa koji otežavaju postizanje vakuuma. U drugom dijelu rada dana je fizika rada vakuum pumpi te su opisane metode generiranja vakuuma. Opisane su vakuum pumpe za postizanje grubog i srednjeg vakuuma te pumpe za visoki i ultra visoki vakuum. Iza toga dan je pregled mjerila vakuuma te mogući načini njihovog umjeravanja uz teorijske opise procesa. Središnji dio rada opisuje proces konstrukcije i izrade vakuum komore te proces nabavke materijala za samu komoru. U zadnjem dijelu rada prikazana su provedena mjerenja te pokazane dostupne vakuum pumpe, vakuum mjerila i načini njihovog spajanja. Prva mjerenja vezana su uz karakterizaciju dostupnih vakuum pumpi (koji tlak mogu postići i koliko im vremena treba). Konačno u završnom dijelu rada dan je primjer umjeravanja piranijevog mjerila vakuuma s rezultatima provedenih mjerenja.In the introductory part of this theis, a brief history, physical basis and classification of the vacuum is given. After that an overview of the processes that make it difficult to achieve a vacuum is given.. In the second part of the thesis, the physics of vacuum pump operation is given, and vacuum generation methods are described. Vacuum pumps for achieving rough and medium vacuum and pumps for high and ultra high vacuum are described. This is followed by an overview of vacuum gauges and possible methods of their calibration along with theoretical descriptions of the process. The central part of the theis describes the process of construction and production of the vacuum chamber and the process of procurement of materials for the chamber itself. In the last part of the paper, the measurements are presented and the available vacuum pumps, vacuum gauges and ways of connecting them are shown. The first measurements are related to the characterization of available vacuum pumps (what pressure they can achieve and how long they take). In the final part of the paper, an example of the calibration of the pirani vacuum gauge with the results of the measurements is given