Characteristics of ZnO/diamond/Si SAW resonators

The surface acoustic wave (SAW) resonator response of ZnO/diamond/Si layered structures are calculated and discussed including velocity dispersion. Smith\u27s second equivalent circuit including energy storage effects is used to calculate the resonator response. The effect of velocity dispersion appears for the shift of resonant frequency to the expected center frequency, and appears for the band width of resonator becomes narrower than that of non dispersive case. The coupling of modes equation is modified for the velocity dispersion to explain these effects. The reflection coefficients of gratings are calculated for velocity dispersive case and the non velocity dispersive case. These results agree with the response calculated by the equivalent circuit model. With assuming the deviation of velocity dispersive be small neighboring the resonance area, the effect of velocity dispersion is explained in theoretically. The ZnO/diamond/Si SAW resonators provide high frequency operation and the high quality factor (Q) SAW resonators due to the velocity dispersion