Cerium dioxide (CeO2) films were deposited on glass substrates by an r.f. magnetron sputtering process. The deposition rates were studied as a function of the molar fraction of oxygen in the system for various input power levels. The deposition conditions were optimized to obtain good quality films for optical transmission. © 1992
In this paper, we report the scalable, high sensitivity, fast response, and low operating temperatur...
CeO2 thin films were deposited by plasma-enhanced atomic layer deposition (PE-ALD). Novel Ce(iPrCp)3...
By using the mass-analyzed low energy dual ion beam deposition technique, a high quality epitaxial, ...
Cerium dioxide (CeO2) films were deposited on glass substrates by an r.f. magnetron sputtering proce...
Cerium dioxide is a rare earth oxide material that can be useful in various optical and electronic a...
Nanocrystalline cerium oxide (CeO2) thin films have been deposited over Si (100), Ni-W (200) and Al2...
In this study, nanostructured ceria (CeO2) films are deposited on Si(100) and ITO coated glass subst...
The influence of the reaction gas composition during the DC magnetron sputtering process on the stru...
Abstract. Cerium oxide (CeO2) thin films have been prepared by electron beam evaporation technique o...
Cerium dioxide films doped with Al were deposited on p-type Si (100) wafers by radio frequency (RF) ...
Cerium oxide (CeO2) thin films were deposited on Pt (111)/Ti/SiO2/Si(100) substrates using pulsed la...
The resistance of surfaces to biofouling remains a significant advantage for optical devices working...
Cerium dioxide thin film optical waveguides were fabricated by an RF magnetron sputtering process. T...
In this study, nanostructured ceria (CeO2) films are deposited on Si(100) and ITO coated glass subst...
The nanocrystalline cerium dioxide (CeO2) thin films were deposited on soda lime (SLG) and Corning g...
In this paper, we report the scalable, high sensitivity, fast response, and low operating temperatur...
CeO2 thin films were deposited by plasma-enhanced atomic layer deposition (PE-ALD). Novel Ce(iPrCp)3...
By using the mass-analyzed low energy dual ion beam deposition technique, a high quality epitaxial, ...
Cerium dioxide (CeO2) films were deposited on glass substrates by an r.f. magnetron sputtering proce...
Cerium dioxide is a rare earth oxide material that can be useful in various optical and electronic a...
Nanocrystalline cerium oxide (CeO2) thin films have been deposited over Si (100), Ni-W (200) and Al2...
In this study, nanostructured ceria (CeO2) films are deposited on Si(100) and ITO coated glass subst...
The influence of the reaction gas composition during the DC magnetron sputtering process on the stru...
Abstract. Cerium oxide (CeO2) thin films have been prepared by electron beam evaporation technique o...
Cerium dioxide films doped with Al were deposited on p-type Si (100) wafers by radio frequency (RF) ...
Cerium oxide (CeO2) thin films were deposited on Pt (111)/Ti/SiO2/Si(100) substrates using pulsed la...
The resistance of surfaces to biofouling remains a significant advantage for optical devices working...
Cerium dioxide thin film optical waveguides were fabricated by an RF magnetron sputtering process. T...
In this study, nanostructured ceria (CeO2) films are deposited on Si(100) and ITO coated glass subst...
The nanocrystalline cerium dioxide (CeO2) thin films were deposited on soda lime (SLG) and Corning g...
In this paper, we report the scalable, high sensitivity, fast response, and low operating temperatur...
CeO2 thin films were deposited by plasma-enhanced atomic layer deposition (PE-ALD). Novel Ce(iPrCp)3...
By using the mass-analyzed low energy dual ion beam deposition technique, a high quality epitaxial, ...