Micromechanical tunable Fabry-Perot interferometer and a method for producing the same

Electrically tunable Fabry-Perot interferometers produced with micro-optical electromechanical (MOEMS) technology. Micromechanical interferometers of the prior art require high control voltage, their production includes complicated production phases, and the forms of the movable mirrors are restricted to circular geometries. In the inventive solution, there is a gap in the movable mirror, whereby mirror layers opposite to the gap are connected with anchoring. The anchoring is such that the stiffness of the mirror is higher at the optical area than at the surrounding area. This way it is possible keep the optical area of the mirror flat even if the control electrodes extend to the optical area. Due to large electrodes, lower control voltages are required.Patent family as of 1.10.2021CN103733035 A 20140416 CN201280038739 20120529 CN103733035 B 20151125 CN201280038739 20120529 DE602012024392 D1 20161124 DE201260024392T 20120529 EP2718685 A1 20140416 EP20120796485 20120529 EP2718685 A4 20141203 EP20120796485 20120529 EP2718685 B1 20161019 EP20120796485 20120529 FI125897 B 20160331 FI20110005545 20110606 FI20115545 A 20121207 FI20110005545 20110606 FI20115545 A0 20110606 FI20110005545 20110606 JP2014522510 T2 20140904 JP20140514119T 20120529 JP5687802 B2 20150325 JP20140514119T 20120529 US2014111811 AA 20140424 US20120124350 20120529 US8913322 BB 20141216 US20120124350 20120529 WO12168545 A1 20121213 WO2012FI50518 20120529Link to current patent family on right