Monolithic Multi-Wavelength VCSEL Arrays with Uniform Performance by Intra-Cavity Phase Tuning

We demonstrate monolithic multi-wavelength VCSEL arrays with wavelengths set by intra-cavity phase tuning. Precise channel spacing is achieved by Ar-ion etching. Uniform performance over an array is achieved by spectral matching and balancing of wavelength dependent gain, DBR reflectances and optical confinement factor