Microsystems for space applications

Recent progress in microsystems technologies make them suitable for space research and development due to their low volume, low mass, low power consumption, leading to reduced mission cost. The most interesting approach is using standard technologies with additional post-processing steps to realise sensors and actuators together with signal processing circuits. This paper summarises some aspects and difficulties of the space environment. The radiation effects in space are described and damage on CMOS structures are explained. Design methodologies for hardening microsystems and MOS based circuits against these effects are presented. Some examples of microsystems examples for space applications fabricated by research worldwide are given