CAD tools for bridging microsystems and foundries

Karam, J.M.
Courtois, B.
Boutamine, H.

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Publication date

January 1997

DOI

10.1109/54.587739

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Abstract

To move microsystems from research prototypes to an industrial market, CMP, the French multiproject wafer service, has adapted an existing commercial tool to the automated design of micromachined devices

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CAD tools for bridging microsystems and foundries

Abstract

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CAD tools for bridging microsystems and foundries

Abstract

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