Proceedings of Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2005), Montreux,Switzerland, June 1-3, 2005

ISBN: 28481303571This Symposium will be a follow-up to the very successful issues held in 1999 and 2000 in Paris, in 2001, 2002 and 2003 in Mandelieu-La Napoule and 2004 in Montreux Switzerland. This series of Symposia is a unique single-meeting event expressly planned to bring together participants interested in manufacturing microstructures and participants interested in design tools to facilitate the conception of these microstructures. Again, a special emphasis will be put on the very crucial needs of MEMS/MOEMS in terms of packaging solutions. The goal of the Symposium is to provide a forum for in-depth investigations and interdisciplinary discussions involving design, modeling, testing, micromachining, microfabrication, integration and packaging of structures, devices, and systems