The industry of micromachining is in its infancy today, just as the VLSI industry has been developing quickly since the late 70's. As design tools made possible the development of the IC industry, design tools will make possible the development of new components combining the physical world needs of sensing and actuators with the rapidly growing capabilities of information technology. This Symposium will be a follow-up to the very successful first issue held last spring in PARIS. This series of Symposia is a unique single-meeting event expressly planned to bring together participants interested in manufacturing microstructures and participants interested in design tools to facilitate the conception of these microstructures. This year, a spe...
Therminic Workshops are a series of events to discuss essential thermal questions of microelectronic...
International audienceThis paper is dealing with CAD, test and manufacturing of microsystems (microe...
Micro-electro-mechanical systems (MEMS) are miniaturized devices that can sense the environment, pro...
ISBN 0819436453The industry of micromachining is in its infancy today, just as the VLSI industry has...
This Symposium will be a follow-up to the very successful issues held in 1999 and 2000 in Paris. Thi...
This Symposium will be a follow-up to the very successful issues held in 1999 and 2000 in Paris and ...
International audienceThis Symposium will be a follow-up to the very successful issues held in 1999 ...
International audienceThis Symposium will be a follow-up to the very successful issues held in 1999 ...
ISBN: 28481303571This Symposium will be a follow-up to the very successful issues held in 1999 and 2...
ISBN: 978-2-35500-009-6This Symposium is a follow-up to the very successful issues held in 1999 and ...
ISBN : 978-2-3550-0006-5The Design, Test, Integration and Packaging conferences are a series of annu...
International audienceThe 2016 edition of the symposium on Design, Test, Integration and Packaging o...
International audienceThe 2015 edition of the Symposium on Design, Test, Integration and Packaging o...
Summary form only given. Micromachined electro-mechanical systems(MEMS), also called microfabricated...
This paper presents an overview of microelectromechanical systems (MEMS) research topics. Manufactur...
Therminic Workshops are a series of events to discuss essential thermal questions of microelectronic...
International audienceThis paper is dealing with CAD, test and manufacturing of microsystems (microe...
Micro-electro-mechanical systems (MEMS) are miniaturized devices that can sense the environment, pro...
ISBN 0819436453The industry of micromachining is in its infancy today, just as the VLSI industry has...
This Symposium will be a follow-up to the very successful issues held in 1999 and 2000 in Paris. Thi...
This Symposium will be a follow-up to the very successful issues held in 1999 and 2000 in Paris and ...
International audienceThis Symposium will be a follow-up to the very successful issues held in 1999 ...
International audienceThis Symposium will be a follow-up to the very successful issues held in 1999 ...
ISBN: 28481303571This Symposium will be a follow-up to the very successful issues held in 1999 and 2...
ISBN: 978-2-35500-009-6This Symposium is a follow-up to the very successful issues held in 1999 and ...
ISBN : 978-2-3550-0006-5The Design, Test, Integration and Packaging conferences are a series of annu...
International audienceThe 2016 edition of the symposium on Design, Test, Integration and Packaging o...
International audienceThe 2015 edition of the Symposium on Design, Test, Integration and Packaging o...
Summary form only given. Micromachined electro-mechanical systems(MEMS), also called microfabricated...
This paper presents an overview of microelectromechanical systems (MEMS) research topics. Manufactur...
Therminic Workshops are a series of events to discuss essential thermal questions of microelectronic...
International audienceThis paper is dealing with CAD, test and manufacturing of microsystems (microe...
Micro-electro-mechanical systems (MEMS) are miniaturized devices that can sense the environment, pro...