RF MEMS series capacitive switch: test and diagnosis

National audienceThis paper introduces a study of the method linking low frequency test and high frequency test by using regression-based techniques for low cost testing of RF MEMS switch. A modelling of RF MEMS switches is constructed to test and diagnose their functionality. The basic idea is to apply a low frequency test to the RF MEMS device and to automatically extract the high frequency characteristics from the low ones. Validation results obtained on a RF MEMS series capacitive switch are encouraging. An evaluation of the feasibility of implementing a built-in-test based on the proposed approach is presented