Dipolar plasma source modeling: a first approach

International audienceThe scaling up of conventional plasmas presents limitations in terms of plasma density, limited to the critical density, and of uniformity, due to the difficulty of achieving constant amplitude standing wave patterns along linear microwave applicators in the meter range. An alternative solution lies in the concept of distribution from one- to two-dimensional networks of elementary plasma. Each elementary plasma source consists in a permanent magnet on which microwaves are applied via an independent coaxial line [1]. The plasma is produced by the electrons accelerated at ECR (Electron Cyclotron Resonance) and trapped in the dipolar magnetic field. Large-size uniform plasmas can be obtained by assembling as many such elementary plasma sources as necessary, without any physical or technical limitations [2]. Simulation of the plasma produced by a dipolar source requires a global, self consistent, modeling of its functioning. In order to obtain results to lead a first optimization of the dipolar source, magnetostatics, microwave propagation and fast electrons trajectories (Particles in Cell (PIC) and Monte-Carlo hybrid method [3]) have been performed with Comsol Multiphysics and MatLab