Infrastructures for Education, Research and Industry: CMOS and MEMS for BioMed

International audienceInfrastructures to provide access to custom integrated hardware manufacturing facilities are important because they allow Students and Researchers to access professional facilities at a reasonable cost, and they allow Companies to access small volume production, otherwise difficult to obtain directly from manufacturers. This paper is reviewing the most recent developments at CMP, focusing on the manufacturing of various kinds of MEMS. These MEMS are hardware vehicles for many BioMed applications. Various examples are provided in the paper. Such infrastructures may help the BioMed community the same way they helped the Microelectronics community at the time of the VLSI revolution