Vibration Energy Harvesting with PZT Thin Film Micro Device

ISBN 0-9743611-5-1International audienceA micro power generator for harvesting vibration energy by means of a piezoelectric laminated cantilever with inertial mass was designed, fabricated, and characterized. The device was micro machined from a silicon-on-insulator structure coated with a 2μm thick piezoelectric PZT thin film. Interdigitated electrodes (IDE) were applied to achieve higher voltages. A piezoelectric coupling constant k2 of 5% was derived from resonance/antiresonance curves. A voltage of 1.6 V, and an output power of 1.4 μW were measured at 2g acceleration and 870 Hz with a cantilever having a 0.8x0.4 mm large active area using the device close to antiresonance