Impact of technology dispersion on slow-wave high performance shielded CPW transmission lines characteristics

International audienceShielded coplanar waveguides are promising candidates for the development of high quality factor transmission lines in millimeter‐wave frequency bands. In this article, state‐of‐the‐art experimental results carried out on a CMOS 0.35 μm low‐cost technology are presented. This letter especially deals with the benchmark of slow‐wave transmission lines in focusing on the impact of technology dispersion on the measurement results. Eight dies have been measured, each from a different wafer, showing a robust design versus the technology. These results open new possibilities for the development of miniaturized low‐loss compact passive devices